Hydrogen Forward Scattering Spectrometry (HFS) is an ion scattering technique that is used to quantitatively determine the vertical distribution of hydrogen in thin films. During the process, He²⁺ ions hit the sample surface at a glancing angle, knocking hydrogen atoms out of the sample, which can then be analyzed using a solid state detector.

The ability to measure the composition and vertical distribution of hydrogen content within a thin film can be critical due to the potential impact of hydrogen on a film’s physical or electrical properties. Other techniques, such as Auger Electron Spectroscopy (AES), Energy Dispersive X-ray Spectroscopy (EDS) and X-ray Photoelectron Spectroscopy (XPS), cannot detect hydrogen; and while SIMS can measure hydrogen, quantification of the hydrogen by SIMS can be difficult and requires standards. This makes HFS a uniquely useful technique for thin film analysis.

Very few labs are able to offer HFS. EAG’s experience enables fast turnaround time, accurate data and person-to-person service, ensuring you understand what results mean for your materials and processes.