EAG Scientists Publish Paper on SIMS Quantification in JVSTB

Eurofins EAG Laboratories (EAG) Scientists Dr. Charles W. Magee and Dr. Temel H. Buyuklimanli recently published a paper that was recently presented at a lecture during the 23rd International Conference on SIMS held in Minneapolis (September 2022).

The paper, entitled “Secondary Ion Mass Spectrometry Quantification: Do You Remember When a Factor of 2 Was Good Enough”, focuses on the early days of SIMS quantification and its evolution throughout the years. It also dives into how EAG tackled the problem of quantification of both major and minor elements in nonuniform, multi-element matrices with continuously graded composition changes using Point-by-point CORrected-SIMS – or PCOR-SIMS.

The paper is included in the special topic collection of papers around the subject “CHIPS: The Future of Semiconductor Processing and Devices”. This collection of papers are relevant to the CHIPS Act passed by Congress.