SIMS Analysis of Individual SiC Particles
Using a special sample preparation technique and a new SIMS analytical protocol, individual SiC particles with a size ranging from 100 um to 500 um in a SiC powder sample can be analyzed.
This innovative approach eliminates contributions from surface contamination to bulk concentration.
N profiles for two different SiC particles from the same batch of powder samples. The SIMS results for these two particles show good batch bulk concentration consistency.
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