EAG’s Nanoprobing Capabilities: Enhanced Analysis and Failure Detection

Nanoprobing is a highly specialized analytical technique used in semiconductor physics and electronics industries. This technique utilizes nanometer-scale precision movement probes to make direct contact with individual semiconductor devices such as transistors. Being able to measure the electrical properties at this level facilitates accurate and non-destructive analysis of nanoscale features which are too small to perform using traditional, manual methods. It is vital to the scientific research and development of advanced electronic devices and materials, enabling the process of failure analysis, design validation, quality control, and manufacturing to help innovate smaller and more novel technologies. Nanoprobing is a key method for analyzing and testing electronic materials, and it can be applied to a broad range of samples such as:

  • Integrated Circuits
  • Transistors, Memory Bit Cells, Test Structures
  • eFuses
  • Nanotubes
  • LEDs, Diodes, MEMS
  • Solid State Batteries

Eurofins EAG operates advanced SEM-based nanoprobing equipment from Kleindiek, Inc. with built-in parameter analyzer and signal/current amplifier to enable a wide range of characterization and analytical techniques such as EBIC/EBAC and EBIRCH. Our cutting-edge system delivers precise measurements and failure analysis for advanced nodes, providing our clients with detailed, highly accurate data to stay ahead in semiconductor development, ensuring product reliability and performance. With the ability to analyze sub-10 nanometer structures, using 8 probes on samples up to 20 x 20 millimeters and a voltage range of +/- 100 V for DC measurements (+/- 50 V for current imaging), the system also features a heating and cooling insert for device characterization across a wide temperature range from -20ºC to +150ºC.

Would you like to learn more about our nanoprobing capabilities?

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